Study On Residual Stress And Rebound Deformation Of Grating Groove Surfaces By Mechanical Ruling

The mechanical scratching of diffraction grating is a process that ploughing and ironing the aluminum materials by using the diamond tools,so that the aluminum materials produce the elastic-plastic deformation and form the structure of grooves.In order to solve the problem of the groove shape quality caused by the residual stress and the rebound deformation in the process of the mechanical ruling grating.In the background of 79g/mm echelle diffraction grating mechanical ruled.First of all,according to the new slip-line field theory and elastic-plastic mechanics principle,prediction model of residual stress and rebound deformation was determined.The numerical model of residual stress is established by analyzing the stress distribution characteristics.It is concluded that the material parameters,scratching parameters and tool parameters are important factors influencing the size of residual stress and rebound deformation.The forming process of grating grooved has been simulated by the finite element analysis software Deform-3D.The stress distribution and the displacement of each point in the process of groove forming are analyzed on Deform-3D.The relationship between the residual stress and the rebound deformation of the groove surface is obtained.The influence of tool parameters and scratching parameters on the residual stress and rebound deformation is analyzed,and it is concluded that the residual stress and rebound deformation are the important factors influencing the quality of the groove.A process experiment was conducted to study the relationship between the surface profile damage and the residual stress distribution by combining the finite element analysis software Deform-3D and scratching test.Meanwhile,using the atomic force microscope to observe rebound deformation on grating groove surfaces by mechanical ruling with multi channel grooves and in order to provide the basis for improving groove quality.