The Fabrication And Study Of LiMn₂O₄ Anode Material?LiMn₂O₄/LiPON/ZnO Solid-state Battery By Magnetron Sputtering

Liquid lithium-ion battery is currently widely used,but the liquid lithium-ion battery overcharge and discharge will leak,explosion and other hazards.With the increasing demand for energy storage devices,all solid-state lithium-ion battery has gradually attracted the attention of researchers.Compared with liquid electrolyte lithium-ion battery,the structure of all solid-state lithium-ion battery is relatively simple,the shape and the size can be controlled,the thickness can be micron level,and there is no liquid electrolyte,which greatly reduce the risk of leakage and fire caused in the charge and discharge.Lithium battery anode material is one of the important factors restricting the capacity of lithium batteries,spinel-type lithium manganate LiMn₂O₄ film with three-dimensional lithium ion diffusion channel,pollution-free,rich reserves,highly safety factor,suitable for lithium battery anode material.The main preparation method of spinel-type lithium manganate is hydrothermal method,sol-gel method,which is not suitable for the preparation of micron-level all-solid lithium battery.In this thesis,Li Mn₂O₄ with spinel structure was prepared by magnetron sputtering,and a complete micro-scale solid-state battery was prepared.The main contents and results of this thesis are as follows:In this thesis,the influence of different preparation techniques on the anode materials of lithium manganate film was studied.The XPS,SEM,XRD and Raman characterization of the prepared materials were carried out by changing the sputtering power,sputtering pressure and ArO ratio during magnetron sputtering.Through the analysis of its morphology and structure,we confirm the ideal process conditions for the preparation of anode materials.The effects of different process conditions such as substrate heating temperature,annealing temperature,annealing time and cooling rate on the morphology and structure of lithium manganate anode were studied.The excellent sputtering preparation process was determined by XPS,SEM and XRD.The lithium manganese oxide film prepared under this condition was encapsulated into a complete liquid lithium battery for electrical performance measurement.By analyzing results of measurement,it was found that the physical and electrical properties of the lithium manganate film are better,which was obtained in the condition of temperature rise to 600 ° C by 3.33°C/min,and annealing at 600°C for 6 hours,subsequently drop to room temperature at 33 ° C / min.The influence of different preparation techniques on the solid-state electrolyte LiPON materials film was studied.The XPS,SEM,XRD and Raman characterization of the prepared materials were carried out by changing the sputtering power,sputtering pressure and ArN ratio during magnetron sputtering.Through the analysis of its morphology and structure,we confirm the ideal process conditions for the preparation of anode materialsThe solid state lithium battery was successfully prepared,and its electrical performance was measured.