Design Simulation And Fabrication Of A New Type Of High-Frequency, Silicon-Based Ultrasonic Nebulizer

Inhalation therapy is an effective method for the treatment of respiratory disease by a non injection route.The nebulizer is an important divorce,which is able to deliver the medicine to target organ efficiently painlessly.We can treat the disease quickly by the way.The atomized particle size distribution is the most important parameters of nebulizer.The particle size of atomized particles produced by atomizer directly influences the effect of inhalation therapy.The number of medicine particle deposited on target organs is in direct proportion to the atomized particle concentration.The performance of the traditional nebulizer is not perfect enough for controlling the particle.The atomized particle size distribution is not uniform.Therefore,it is of great theoretical and practical significance to develop a new type of nebulizer with uniform particle size distribution.This paper presents the design and fabrication of high-frequency,silicon-based ultrasonic nebulizer which has the self aligned fluid path using microfabrication technology.Each nozzle is made of a piezoelectric drive section and a silicon resonator consisting of multiple Fourier horns,each with half wavelength design and twice amplitude magnification.It perfects well in controlling the particle distribution.The main research contents of this paper are as follows:(1)The principle,advantages and disadvantages of the commercial nebulizers are introduced,as well as the research status of domestic and foreign.So the research purpose and content are derived.(2)The theory of piezoelectric actuator and amplitude transformer is introduced,as well as the automation mechanism,and discussed the feasibility of atomizer design in theory.(3)Designed the nebulizer.With the aid of Finite Element Analysis software,we analyzed the characteristics of the device systematically.Modal analysis and harmonic response analysis are obtained.The mode of vibration and resonant frequency are also gained.Thecharacteristics of impedance,displacement and stress distributions at a certain resonant frequency,and displacement of the amplitude transformer of each part changing with the time are also obtained later.The device works at the voltage of 30 V.The simulation results are compared with the theoretical analysis to prove the rationality and fea sibility of the design.(4)The atomizer is prepared by MEMS technology.Silicon-based pocket-size(7)(8)322.6?10.8?1.06 mm ultrasonic nebulizer is got.The resonant frequency is 1MHz.(5)The device is tested.The impedance curve and resonant frequency are obtained with the help of impedance meter.Measured the amplitude using the laser Doppler vibration.Finally,analyzed the test result.(6)Finally,a summary of this paper,and prospect.The deficiency of the paper is pointed and the further work is provided.