Study Thermal-mechanical Coupled Properties Of Electro-thermal Actuator

MEMS-based electro-thermal actuator is capable of generating tens of milli-Newton force and a few micrometers displacement.The thermal actuator has several pairs of inclined beams connected between the substrate and the central rigid shuttle subject to a uniform increase in temperature along its length.When a voltage difference is applied across the two anchor sites,heat is generated increase in the temperature in turn expands the beams and moves the shuttle.Study the thermo-mechanical coupled model and thermo-displacement coupled model of the electro-thermal actuator.The electro-thermal actuator is made of polysilicon.The electro-thermal and thermal-mechanical properties of polysilicon are temperature dependent.The temperature-dependent properties are also considered in the coupled models.The thermo-mechanical and thermo-displacement response of the electro-thermal actuator V-shaped structure can be equivalently computed by considering half of the structure.Build three models about inclined beam of the electro-thermal actuator key unit: simply supported beam model,directional hinge support beam model,fixed end beam model.The temperature-dependent material properties,which are essential to the axial force,critical reaction force and the thermo-displacement of the inclined beam.The temperature-dependent material properties,which are essential to the maximum operation voltage,the temperature distribution and displacement filed of the overall of the thermal actuator.The nanotechnology develops rapidly.The inclined beam can be at the nanoscale,and the size-dependent effect becomes significant in young's modulus,thermal expansion coefficient.The size-dependent effect which is essential for nanobeam mechanical behavior including critical reaction force,thermal reaction force.