Research And Design Of Simultaneous Phase-Shifting Testing System For Optical Surface

With the ever-increasing use of optical products, the demand to precision of lens manufacturing is more and more strict. In order to improve the precision, we should not only improve the grinding technology, the more important one is the improvement of detecting technology. With the application of surface deviation detection method, we could improve the lens surface accuracy efficiently. In addition, how to finish the precision detection in harsh environment has a very important significance for outdoor debugging assembly and workshop online detection.For the problems we met in the experiment, for example, the changes of interference fringes which would affect the detection precision. In this essay, we introduced a synchronous phase shifting optical surface detection system on the basis of original light path. At first, we analyzed the theory of polarization interference technique. On this basis, we decided to choose two dimensional grating to divide the light, and polarization matrix to phase shift. Then we designed the synchronous phase shifting interferometry system, and introduced the structure and adjustments of experimental light path. Furthermore, we would analyze the interference images collected from the experiment. Next, we would analyze the main components in the system, and discuss the problems existed in the experiment. We provided separate scenarios for each problem, and we had finished the feasibility analysis. At the end, we summarized the research, and we pointed out the innovations of the system. In addition, we looked into the future of the research.The innovations of the system:1. On the basis of the polarization interference technique, we brought synchronous phase shifting technique in to the system. This technology could be applied in the surface detection of the optical lens, the system would have the better ability to resist the interferences of the environment. The precision of the later image processing could be improved. In other words, the system could operate in bad conditions to detect lens and the lens could be test on-line in the workshop.2. We used two-dimensional grating as light splitting component, the method and structure are simple. In addition, we used polarization matrix as phase-shift component, it has high precision. Moreover, we used a CCD to collect 4 phase-shift interference images at the same time, in this way, we could reduce the errors of the detection resulted from the differences of the CCD and reduce the cost.3. As for the problems from the experiment, we provided scenarios such as converging light, flat type spectroscope, combined spectroscope. It has important significances for miniaturization and the improvement of the quality of the interference images.