Key Technology Study Of Mass-sharing Cantilever Array Based Micro Piezoelectric Vibration Energy Harvester

With the rapid development of micro energy harvester technology and application requirements, how to implement environmental kinetic energy efficient access and efficient transformation, has become a focus in the study of micro energy harvester technology.This dissertation regards a large engine fault monitoring system as a specific application object. This paper proposed a new structure of cantilever beam array sharing one mass based micro piezoelectric vibration energy harvester; and analyzed its structure and working principle. Based on the lumped parameter model, the main factors which affect the output performance of the energy harvester were analyzed. With the help of the finite element simulation software ANSYS, structural parameters of the micro piezoelectric cantilever array based vibration energy harvester were optimization designed, and we formulated the corresponding processing process flow, explored the structure design and technology of device's wafer level low vacuum encapsulation. Under the vibration of 3g and 606 Hz, the prototype output voltage and the output power can reach 11.02 V and 660.06 ?W.The main research work of this paper is:(1) The research status of micro piezoelectric vibration energy harvester was analyzed, and the research goal and content of the paper were defined.(2) A new structure of cantilever beam array sharing one mass based micro piezoelectric vibration energy harvester was proposed; and its working principle was analyzed. Based on the lumped parameter model, the main factors which affect the output performance of the energy harvester were analyzed.(3) According to the actual application demand, the main technical indicators of the micro piezoelectric cantilever array based vibration energy harvester was determined, and the optimization idea of the device's core structure was studied, the influence of the structure parameters on the output performance was analyzed by ANSYS finite element simulation software. The ANSYS was also used for the analysis of the device's stress, and the encapsulation structure parameters were determined.(4) Based on the structure of the micro piezoelectric cantilever array vibration energy harvester and MEMS technology, the machining process of the device was developed, and the mask layout was design by L-edit software. And we developed the prototype based on MEMS processing technology. Explored the wafer-level low vacuum bonding process;(5) Study on the test method of the device, then built the test platform and completed the test and analysis of the prototype's performance. The output voltage and the output power can reach 11.02 V and 660.06 ?W of the developed the principle prototype in 3 g and the vibration of 606 Hz. Experiments show that the performance of the cantilever beam array sharing one mass based micro piezoelectric vibration energy harvester can satisfy the needs of practical applications.