| Piezoelectric actuator has many advantages like simple structure, fast response,high energy dense,no need to lubrication,it is widely used in aerospace, precision instrument, medical device and so on. There are hundred kinds of piezoelectric actuator in this world so far. Aiming at the problem that axial force of spiral-driving linear piezoelectric actuator is too small(less than 5N in most case),a spiral-driving linear piezoelectric actuator based on exponential amplitude transformer was designed,the feasibility of actuator application in miniature slide was explored.First of all,the construct of stator with amplitude transformer was designed to three parts,ANSYS is used for finite element analysis, to find the relation between amplitude transformer length,radius of small tip,material of stator,structure parameters and amplitude,resonant frequency. The size of actuator are defined. Modal Analysis and harmonic response analysis are done with finite element analysis, the best exciting frequency is found and the value is 15.3 KHz.A prototype of spiral-driving linear piezoelectric actuator based on exponential amplitude transformer is made. Actuator special driving circuit based on FPGA is designed which can rang frequency, voltage and phase. Through the experiment test, under 200 V effective voltage and 15.6 KHz resonant frequency and the phase offset is 90°, its linear velocity gets 3.392mm/s, maximum output force reaches to 11.02 N. Compared with spiral-driving linear piezoelectric actuator in the present journals,the axial force has obvious improvement.At last,the piezoelectric actuator was applied in miniature slide, static analysis and dynamic analysis are done,cutting force of miniature slide was tested. The result show that miniature slide linear velocity gets 2.02mm/s,cutting force of three direction:Fx=4.2N、Fy=2.8N、Fz=0.7N. |