Structure Design Of White Light Interferermeter With Large Range

The wight light interferermeter(WLI) is especially suitable for structure surface measurement, for its characteristics of non-contact and high precision. For vertical and horizontal measurement with large range demand of structure surface, such as MEMS and micro-optics, it is of application significance to do research into WLI. Design a vertical and horizontal scanning mechanical structure of WLI in this text. The research mainly includes:1, For measurement demand of structure micro topography, such as MEMS and micro-optics, design an overall program and system architecture of WLI with large range on the basis of WLI vertical scanning surface topography measurement theory.2.Design coarse-fine driving vertical scanning and positioning system with large range and high precision. Coarse driving part is composed of a step motor and ball screw, which makes a scanning range 8mm with resolution less than 1?m. Fine driving part is composed of a PZT and a flexible hinge, which makes a range 20?m with resolution 1nm. Make ANSYS simulation design of flexible hinge, angle adjustment device, and the natural frequency of the instrument.3.Design a co-planar horizontal scanning two-dimensional stage with large range, which is compact in the structure and convenient in the alignment of movement relationship back and forth. And ensure good running flatness and scanning positioning precision.4.Design a grating interferermeter vertical scanning displacement measurement system,which is combined with grating diffraction polarization interferometry to achieve a wide range of vertical scanning displacement with high resolution.5.On the basis of foregoing, construct the vertical and horizontal scanning system of WLI. With microscopic interferometry, image acquisition and analysis software system, a WLI profiler is completed to make a test and the good performance is verified.