Research On The Sealing Technology And Mechanical Properties Of Al₂O₃ Ceramics And Titanium In Biological Implant Devices

Al₂O₃ ceramics and titanium have far-reaching application prospects in the field of biological implantation becAuse of their excellent biocompatibility.In this paper,the surface of Al₂O₃ ceramics and titanium was modified by magnetron sputtering which is biocompatible,and then using the Au solder to sealing the Al₂O₃ ceramics and titanium that were modified.In this paper,the joints are characterized and the mechanical properties of the joints are also evaluated.The parameters of magnetron sputtering have a great influence on the thickness and uniformity of deposited film.The experimental results show that the thickness of the film is linearly related to the time and is also index to the power;other parameters like sputtering gas pressure,sputtering gas flow and target distance mainly affect the uniformity of the film.Combining with the experiment results and equipment parameters,the sputtering pressure is 3Pa,the gas flow is 30 sccm,the target distance is 12 cm.The deposited film was characterized,the results show that the metal film is amorphous and has a rough surface,which affect the wettability of Au on the surface of deposited films.The pure metal Ti,Nb,Mo are soldered,and the surface of Al₂O₃ ceramics which deposited Ti,Nb,Mo film sodering with its own and titanium,the results show that the welding of Al₂O₃ ceramics and titanium can be only achieved by deposited Mo film on the surface of Al₂O₃ ceramics and titanium at the same time.After the Mo flim was sputtered on the surface of the Al₂O₃ ceramics and titanium,then using the Au solder to welding.When the temperature is low,the interface of the joint is organized with（Ti,Mo）ss/Au2Ti+Au+（Au,Mo）ss+Au+（Au,Mo）ss,but when the welding temperature and holding time increased,while the interface structure is organized with（Ti,Mo）ss/Au2Ti+（Au,Mo）ss+Au+（Au,Mo）ss.After the Ti/Mo film layer was deposited on the surface of Al₂O₃ ceramics and sodering with the titanium whose surface was deposited with Mo,the interface is like with the joint of Al₂O₃/Ti deposited Mo which is soldering in the low temperature,the interface between Ti and Al₂O₃ ceramics is organize with TiO2/TiAl/Ti3 Al.The shear strength of the Al₂O₃ ceramics and titanium which surface is deposited with Mo film can reach 206.54 MPa in the parameters of 1100℃/5min,when sputtering the Mo to the surface of Al₂O₃ ceramics,increasing the temperature of the Al₂O₃ ceramics substrate will increase the shear strength of the Al₂O₃/Ti joint,but only when the bias under the 20 V can increase the shear strength of the Al₂O₃/Ti joint.In order to strengthen the interfacial bond strength between the deposited film and Al₂O₃ ceramics,depose Ti film on the surface of Al₂O₃ ceramic before sputtering the Mo flim.But the reaction between the Ti and Al₂O₃ ceramics generated the brittle compound like TiO2/TiAl/Ti3 Al,the compound make the joint fracture at the Al₂O₃ ceramics in the shear test.