| Wettability,as one of the important properties of solid material,is influence in practical use.Generally,wettability is tested by contact angle.The surface where the contact angle is lower than 900°is hydrophilic,while if it is higher than 90° is hydrophobic.K9 glass,used as the touchscreen of mobile phone industry,has the hydrophilic surface.According to the requirement of the industry,we deposited Si-DLC and SiOx-DLC films on the K9 glass to improve the hydrophobicity,respectively.In this paper,the principle,design of the key parts,helmholtz coils and vacuum chamber of the electron cyclotron wave resonance(ECWR)RF sputter system are introduced.Optical emission spectrometer(OES)is used to find the proper DC current intensity resulting in the system reaching the electron cyclotron wave resonance effect.The Si-DLC films are deposited on the K9 glass by the ECWR RF sputter system by sputtering the Si target in Ar/CH4 mixture gases.The surface morphology,structure and chemical composition of the films are observed by scanning electron microscope(SEM),Raman,X-ray diffraction(XRD),X-ray photoelectron spectroscopy(XPS)and transmission electron microscopy(TEM),respectively.The results show that the surface of films is densified and smooth and the films are main DLC films.There are also amorphous Si(a-Si)and SiC nanoparticles which are very small and wrapped by the amorphous carbon matrix.The thickness of the films deposited in different time is measured by stylus profiler to calculate the deposition rate of the Si-DLC films.The results show that the deposition rate is about 65nm/min.Contact angle meter are used to test the water contact angle before and after friction test(using pin-on-disk tribometer).Hydrophobic surface can be achieved with the help of prepared Si-DLC films.Such hydrophobic surface showed good long term stability than the K9 glass.The SiOx-DLC films are deposited on the K9 glass by plasma enhanced chemical vapor deposition(PECVD)system in Ar/HMDSO with/without CH4 mixture gases.The surface morohology of the films is observed by SEM.The results show that the surface of the films deposited in different deposition paramaters is different.The surface of the films deposited without DC negative bias voltage is densified and smooth.The surface of the films deposited in differernt DC negative bias voltage is rough and there are a large number of particle clusters.The variation of the CH4 content has the same influence.The Raman results show that the films are DLC films,and clusters polymer is included in the films.Through XPS,the atomic concentration of SiOx-DLC films in different content of CH4 is calculated.The content of Si decreased with the content of CH4 increasing.Contact angle meter are used to test the water contact angle before and after friction test.Hydrophobic surface can be achieved with the help of prepared SiOx-DLC films.Such hydrophobic surface showed good long term stability than the K9 glass. |
