Study On Micro Nano Structured Antireflection Materials Based On UV Nanoimprint Lithography

Micro-nano structure has excellent optical anti-reduction performance,and is widely used in many fields,such as optical devices,solar panels and so on.As a kind of micro nano structure,the moth eye nanostructure has the characteristics of wide band and large viewing angle.In this paper,the nano structure of moth eye was prepared on the surface of polymer by UV nanoimprint lithography,and its forming and anti-reduction properties were studied theoretically and experimentally.Nanoimprint lithography,as a new generation of lithography,has been widely used in micro nano fabrication.This paper combines the dispensing process UV nanoimprint process on the surface of polymer prepared area of 200mmx200mm,surface roughness,moth eye nano structure film layer structure,the reflectivity of the moth eye nano products in band for 350-850nm,the case of normal incidence the mean reflectivity can reach 1%-2%,and the incident angle at less than 110 degrees can achieve good anti reflection effect.To explore a roll of plate(RTP)imprinting process using PDMS membrane preparation and optimization of parameters of moth eye nanostructures,the pressure 0.15Mpa,transfer speed oflmm/s,the viscosity 100cps process conditions of UV curable adhesives,successfully on the surface of polymer prepared by moth eye nanostructured films,and observed under AFM moth eye nano copy structure high rate of smooth surface,less defects.In addition,the PDMS soft film is put on the roller,so that the process can be continuously molded,and through the above experiment,the feasibility is preliminarily verified.Using FDTD theory,the antireflection properties of different types of nanostructures are studied.The influence of characteristic parameters on reflectivity is analyzed.The simulation results show that the reflectance of 0.5%,0.7%and 0.35%is achieved by 400nm-1000nm,respectively.Finally,through consulting literature,the advantages and disadvantages of each test system are compared.A set of test system which meets the requirements of this experiment is constructed.The optical properties of the nano film on the surface of the moth are characterized.