Preparation Of Hard Coatings And Rigid Surface By Plasma Enhanced Balanced Magnetron Sputtering

In this paper,plasma enhanced magnetron sputtering technique was used to prepare the steel surface and the preparation of the hard coating.The research of this paper can be roughly divided into four parts,the preparation of chromium nitride coating,the preparation of titanium nitride coating,the surface nitriding of austenitic stainless steel and the preparation of titanium nitride coating.The effect of chromium nitride coatings were prepared on the base of the main process of the workpiece rotation bias and deposition rate,morphology,microstructure and mechanical properties of titanium nitride coating;in the preparation process of the main effects of filament bias and nitrogen flow rate and substrate material on the coating deposition rate,surface morphology,microstructure and mechanical properties the influence on the structure and mechanical properties;microstructure of nitrided layer thickness,main substrate bias and nitriding time on the surface of austenitic stainless steel nitriding process;in the effect of titanium nitride silicon coating preparation process of silicon content and matrix materials on the structure and mechanical properties of the coating morphology,microstructure.The experimental results show that the density,hardness and wear resistance of chromium nitride coatings increase with the increase of substrate bias voltage.The deposition rate of the coating is much larger than that of the rest of the workpiece frame at rest,but the mechanical properties of the coating are relatively low compared with that of the workpiece holder.In the preparation of titanium nitride coated wire when the bias current is 6A coating morphology is cone type,when the filament current of 9A coating morphology similar equiaxed crystal structure,when the filament current reaches 12 A almost can not see the morphology of the coating,that is to say with the increase of wire drift coating morphology change three similar to pyramid crystal structure,even because the dense degree is too high to see the specific morphology,also found that the mechanical properties of the coatings is greatly improved.It can be found that the hardness of the coating is almost doubled,and the thickness of the nitriding layer increases with the increase of substrate bias and nitriding time in the process of nitriding of austenitic stainless steel.The bonding strength of austenitic stainless steel after nitriding and coating was found in the preparation of titanium nitride coating,but the substrate bias was not conducive to the combination of the coating and the coating.