| ITO film as a good performance of transparent conductive film and transparent insulation materials,has been widely used in flat panel displays,transparent windows,solar cells and other occasions,and LaB6 nanoparticles in the near infrared region of the insulation effect,in the field of transparent insulation There is a huge market demand to make up for ITO film in the near infrared area barrier effect is poor.On this basis,ITO/LaB6/ITO composite films were first prepared on the glass substrate by magnetron sputtering technology,and their applications in the field of transparent conductive films were explored.The influence of the microstructure of the films before and after the heat treatment on the growth of the films was studied layer by layer,and the influence of the microstructure of the films before and after the heat treatment on the photoelectric properties of the films was studied layer by layer.The growth of the films was studied by SEM,AFM and XRD.It was found that the surface of the films became flat and the roughness of the films decreased with the increase of the number of layers before heat treatment.After the heat treatment,the ITO film was changed from amorphous to polycrystalline,the film had internal stress,and the roughness of the film increased.With the increase of the number of layers,the uniformity of the film increased.The optical and electrical properties of the films were investigated.The results showed that the transmittance and the square resistance of the films decreased with the increased of the number of layers.After heat treatment,the transmittance and square resistance of the films were improved,surfacecarrier concentration and mobility increased.After the heat treatment,ITO/LaB6/ITO films with the best comprehensive photoelectric properties were obtained at sputtering time of 1min/5min/2min due to the uniform and smooth morphology and structure,the average transmittance in visible light was 91.3% and the square resistance was 23.0ohm/sq. |
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