Integratedmanufacturing Method Of Micro/Nano Devices Based On Optically Induced Electrodynamics

Micro/nano-technology is a key component that is the future development of science and technology,which process products to the miniaturization and intelligent direction.Traditional micro/nano-machining technology requires expensivepr ocessing equipment,high processing conditions,greatly restricting the wideap-plicati on of micro/nano processing technology.Optically induced micronano processing technology,which based on the principle of dielectrophoresis,not only can be carry outtransfer and separate micro/nanoparticles,such as polystyreneparticles,carbon nanotubes,biological cell,but also complete the metalion electrochemical deposition,to achieve the processing of micro/nanometal fabricati-on.Micr/nano flexible devices can be applied to many biologicaltesting,the current processing methods are mainly limited to printing and lithography methods,processing costs and minimum processing accuracy is very limited.In this paper,we takeoptically indueed micro/nano processing as our research target,the processing parameters of metal microelectrode were investigated and analyzed,also the metal microelectrode produced by the optimized parameters was transferred to the flexible substrate.The optically induced micr/nanofabrication of flexible devices.The main contents of this thesis include:(1)Based on optically-induced electrophoretic aggregation and dynamic shift of polystyrene particles and PEGDA modules.Based on the optically induced electr-ophoretic effect of micro-nanoparticles and the experimental and simulated operating parameters,the PEGDA module was moved and manipulated by the electr-ophoretic mobility on a optically electrophoretic platform to realize the splicing,alignment and rotation of modules.(2)Study the principle of optically induced electrochemical reaction.The mechanism of optically induced electrochemical reaction was proved by mathematicalformula analysis,and the finite element analysis software was used to simulate the optically induced electrochemistry in space,and the corresponding reaction mechanism and parameters were obtained.(3)The processing parameters of metal microelectrode based on optically induced electrochemical deposition were analyzed.The shape of the machined metalmicro electrode was controlled by the study of the processing parameters(frequency,amplitude,concentration of metal salt solution and thickness of hydrogenated amorphous silicon)of the metal microelectrode which affected the photo electrodeposition of the metal microelectrode.The surface roughness and the deposition height are characterized,and the corresponding parameters can be processed to meet the requirements of the metal microelectrode.(4)Transfer the optically induced electrodeposited metal microelectrode to a flexible substrate using a transfer method.The feasibility of this method is to transfer the opticallyelectrode-deposited metal microelectrode onto the flexible materialan densure the shape of the micro-metal electrode after transfer is complete andthe conductivity is good.(5)On the basis of different transfer methods and transfer parameters of the experimental analysis,the theoretical transfer success probability,and through the experimental results to optimize the transfer method,to get a high efficiency,complete transfer of micro electrode mode.By using optically induced electrochemical deposition,the metal microelectrode can be rapidly deposited at normal temperature and pressure.The microelectrode can control the shape and height of the deposited electrode by controlling the external parameters.And the fine degree,themi crometalelectrode is transferred to the flexible material,expanding the application range of the optically-induced electrochemical deposition electrode,thus laying a foundation for the realization of the flexible sensor device.