Design And Detection Of Ellipsoidal Mono-Capillary For X-Ray Nano-Imaging

The single-bounce ellipsoidal mono-capillary is one of the key component of the 3D nano-imaging beamline for full-field Transmission X-ray Microscope(TXM)system in Shanghai Synchrotron Radiation Facility(SSRF)phase-II project.However,the key technology of ellipsoidal mono-capillary has been monopolized by foreign companies.In order to realize the localization of this key equipment,we and Beijing Normal University(BNU)are developing the technology.We design the physical parameters of ellipsoidal capillary to matching different Zone Plate(ZP),based on the characteristics of light source and the numerical aperture(NA)of Zone Plate used in TXM..Beijing Normal University(BNU)has fabricated,many ellipsoidal capillaries based on the design parameters.In order to evaluate the performance of the capillary,we firstly performed optical test on the ellipsoidal capillary.At present,the best slope error of capillary is less than 15?rad(RMS),which meets the design requirements.Secondly,X-ray examination was performed on the ellipsoidal capillary.The parameters of capillary,such as the uniformity of the focused spot,divergence angle,focal length,depth,efficiency and slope error are mainly examined.Based on the developed capillary,the TXM system was set up at X-ray imaging beamline(BL13W1)and the test beamline(BL09B)at SSRF.The TXM imaging was achieved successfully based on the ellipsoidal capillary BNU#5 and the ZP with outermost zone width of 70 nm.The spatial resolution of 100 nm was achieved.And the nano-imaging was also successfully implemented by the capillary bnu#10 matching the ZP with outermost zone width of 30 nm.However,the imaging quality is not so good.The reason may be that the flux on the sample is not enough for high resolution imaging,which cause the long exposure time and the low SNR(Signal Noise Ratio).In conclusion,we independently designed and successfully developed the ellipsoidal capillary.And the characteristics of ellipsoidal capillary were measured by optical measurement and X-ray detection.Based on these ellipsoidal capillary,we have built TXM imaging system at SSRF,and realized the nanometer resolution imaging.It had accumulated relevant experience for the construction of TXM system for the 3D nano-imaging beamline endstation in SSRF phase-II project.