Study On Supercritical Carbon Dioxide Flow And Particle Characteristics In Microchannel Cleaning

With the integrated circuits and devices in the semiconductor industry are becoming smaller and smaller,more and more micro channel is included in the circuit.The requirement for the cleanliness of the micro channel surface is higher and higher.If the micro channel surface is not clean or damaged,the subsequent process will not be able to carry out.The green cleaning technology has become the key technology that affects the development of the industry because of the loss of the cleaning problem every year.Supercritical carbon dioxide is used as a green cleaning solvent to clean the particles in the micro channel,which can overcome the disadvantages of the traditional cleaning method.Therefore,it is necessary to carry out study on the characteristics of supercritical carbon dioxide flow in micro channel and its effect on micro particles.In this paper,the Multiphysic COMSOL software is used to simulate the flow characteristics of the water in the micro channel in a continuous way,and the results are compared with the experimental results in the literature.And then,the method is used to simulate the flow of supercritical carbon dioxide.This paper study on its flow characteristics in micro channels,including the influence of different Reynolds number and micro channel structure on fluid dynamic entrance length and resistance characteristics,and the results were compared with the macroscopic flow to find differences.Then,the force of particle in the micro channel is analyzed by using a single fine particle as an object.Through the model simplification,The effect of supercritical carbon dioxide on fine particles during cleaning was studied.Simulation results are included in the change rule of the lift characteristics,the inertial aggregation position and the velocity distribution of the fine particles in different particle size,flow Reynolds number and ambient pressure,which provides a certain basis for the optimization of supercritical carbon dioxide green cleaning in the practical engineering.