The Nonlinear Dynamics Research Of MEMS Resonators

MEMS technology is the most important direction of development of science and technology in the 21 st century. And MEMS resonators are also the most important components of micro-electromechanical systems. Therefore we must do the research to understand the impact of various design parameters on vibration performance. In the paper, the effect of the air squeeze film damping and the nonlinear static driving characteristics and the nonlinear vibration characteristics will be studied about the nonlinear dynamic of MEMS resonators.First of all, the energy dissipation mechanism of MEMS resonator is discussed, and the mathematical relationship between the quality factor of the MEMS resonators and the energy dissipation mechanism of MEMS resonator is given. The squeeze damping force of the MEMS resonators may be used in different conditions, therefore different formula of squeeze damping force should be given by application of Reynold equation. And the scope of application the formula should be pointed out.Then the nonlinear dynamic of clamped-clamped beam MEMS resonators is studied. And also improve the dynamic model of MEMS resonators. Application of multiscale method of MEMS resonators, analysis of the environmental pressures, the DC bias voltage, AC voltage and the cubic nonlinear static rigidity of design parameter on micro-linear forced vibration resonant frequency and amplitude-frequency response characteristics of impact by perturbation analysis. When the micro-mechanical resonator in high frequency vibration displacement. The cubic nonlinear static stiffness on vibration characteristics of impact of MEMS resonators is discussed.Finally, through the analysis of the MEMS resonator damping and nonlinear dynamics characteristics, the numerical simulation of MEMS resonators must be done by the Mathematics software and ANSYS finite element analysis software. Three modal analysis of the micromechanical beam Resonators had done application of ANSYS, memory comparison between modal analysis and results. MEMS resonators frequency and amplitude-frequency response characteristics is studied, and compare with the theoretical results.The results showed, with the increasing of environmental pressure, it will make micro-mechanical resonators by resonance frequency increased, steady-state vibration amplitude was significantly reduced. DC bias voltage has a softening affection, environmental stress has a hardening affection. And it also indicates that cubic nonlinear electrostatic force will make MEMS resonators exhibit softening or hardening nonlinear characteristics and can not to be ignore by amplitude frequency curve for small amplitude vibration. Numerical simulation and theoretical analysis of results and prove the correctness of the analysis in this paper.There is certain reference value Methods and conclusions of this research on the understanding and development of micro-mechanical resonator dynamics involved in the scale effect, damping and the nonlinear dynamics.