Research On Optical Microscanning X-ray Real-time Imaging System

As the detected workpieces, such as printed circuit boards, integrated circuits become increasingly integrated, the feature sizes of circuits become smaller and smaller. The requirements of spatial resolution of X-ray real-time imaging system are higher and higher on industrial flaw detection for circuit boards and other products. Whereas, the spatial resolution of existing systems can not meet the need for high-resolution imaging applications. So in this paper, based on the X-ray real-time imaging technology and the optical microscanning technique, a new high resolution X-ray imaging system with optical microscanning was researched and designed, which had low price and high performance.Firstly, a novel X-ray imaging system with optical microscanning is put forward and designed. The system realizes high-precision micro-displacement by piezoelectric ceramics driver detector. The working principle of the optical microscanning was analysised. Moreover, the parameter designtion, the error analysis, the process tolerance and the composition of the whole system were all given.Secondly, based on the imaging characteristics of X-ray real-time imaging system, this paper studyed a frequency domain sub-pixel precision image registration techniques of high accuracy, good real-time performance which was suitable for the system. The principles, processes and concrete steps of frequency-domain windowing image registration method were introduced. Simulations of different registration algorithm for X-ray image were studied. Simulation results showed the effectiveness of the registration algorithm. The technique improves the accuracy of the actual X-ray image registration to a sub-pixel level and lays a foundation for subsequent super resolution reconstruction.Finally, taking the inaccurate estimates of registration parameters, the inaccurate estimates of the point spread function and the additive Gaussian noise in the low-resolution image sequence into account, an image super-resolution algorithm was studyed. The low resolution frames are adaptively weighted according to their reliability and the regularization parameters. And then we completed the super-resolution reconstruction. The method can use the actual collection of undersampling to obtain high resolution image sampling image and the spatial resolution of system was improved.In this paper, the novel X-ray imaging system with optical microscanning was designed. The paper has important reference value for the desigination of high resolution photoelectric imaging systems. With the realization of the hardware, the high resolution, low price and fast X-ray imaging system can be obtain, and the system will have wide application prospect.