The Design And Fabrication Of Integrated MEMS-FAIMS Chip

High-field asymmetric waveform ion mobility spectrometry(FAIMS) is a gas phase ion species identification technique with the advantages of rapid detection, highsensitivity and amenability to miniaturization. FAIMS technology has great advance in the last 30 years, especialy combined with MEMS technology. Therefore it has wide perspective and practicability in the field of environmental monitoring,explosives,drugs and chemical warfare agent detection.The working principle of FAIMS technology is differentiate between the different ions which separated by high-field asymmetric square wave. The accuracy and resolution of sensitive part in FAIMS chip upgrading by MEMS technology. Also, the mathematical model of system is established, which gives much valuable information to the later researchers. At the same time, it is tersely described the ion molecule reactions in the drift process.Combined with the technology of MEMS-based, the process flow and lithography mask layout of the FAIMS chip based on MEMS technology was designed. Because the involved key process have been studied, the chip has reached the design requirements. Finally, the chip has been finished the processing and manufacturing. The chip size tested and complies with the design requirements...