The Research Of Metal-Oxide Temperature-Changing Gas Sensing Film Components

In the field of technology research on gas sensing metal oxides, due to many defects existed in the popular TGS components at home and abroad, for instance, done by only manul coating, but cannot realize automating & integrating production; and there’s only one base material SnO2 can be used, which severely limit the mass production and development of gas sensing components, therefore, the Research & Development of gas sensor technology has been a spotlight in the research field from home and abroad.This paper introduces using the film gas sensing components to replace the current TGS components which is popular at home and abroad, conducts an in-depth research on the theory and technical process.The main work of this paper includes the following aspects:(1) Designed two chip structures of temperature-changing film gas sensing components, and made comparison explanation on designing difference between the two versions of chip structure in detail.(2) Designed the manufacturing process of temperature-changing gas sensing film components, among which including chip-manufacturing process flow, packaging manufacture process and so on. The chip-manufacturing process involves preparation for double-side & double-insulating layer Al2O3/SiO2/Si/SiO2/Al2O3, generates heater and thermoscope by front-side photoetching, and high-energy sputtering gas sensing layer by reverse-side photoetching. The packaging manufacturing process includes dicing, selecting, spot welding, pry die, packaging forming etc.(3) Based on the conclusion of principles on temperature-changing gas sensing film components, built up the testing & experimental device; with the experimental device, gained the experiment results and on which made discussion and explanation.(4) Designed the detector of temperature-changing components, and made the explanation.The paper is focused on designing two kinds of chips of temperature-changing gas sensing film components; simultaneously designing the manufacturing process & packaging manufacturing process and carrying out a trial production; concluding principles on temperature-changing gas sensing film components; selecting testing equipment to gain test result; therefore verifying the feasibility of temperature-changing gas sensing film components.