Structure Design And Producing Method Research For UV Integrated Biological Chip

This paper introduces the work principle and structure of ultraviolet biochip, from three aspects to resolve the ultraviolet biochip research problems; Respectively is a high-performance SI PIN detector design; Ultraviolet light emitting diode epitaxial layer design, simulation and test; PDMS microchannel design and production process of research. In order to get a higher response frequency of SI PIN detector will make shallow junction and depletion layer width smaller chip in this paper, through theoretical derivation and use APSYS simulation software validation. In order to improve the efficiency of the uv LED, this paper studies the potential energy disturbance in Al Ga N quantum well the role of band structure. Using Al Ga N uneven or part of the lateral growth Al Ga N orderly, and orderly Al Ga N than disorderly Al Ga N has a smaller band gap. Injection of electrons and holes on the concentration of the active region at least potential and exciton formation, so you can avoid moving electrons and holes in the defect region and the radiative recombination. To mold in this paper also studied the method of the micro circulation of substrate, using lithography etching legal system make the silicon die cavity, through twice moulding process produced PDMS substrate. Test the ratio of matrix and hardener substrate cover plate is 5 to 1 to 10 to 1. Under the mercury lamp light 3.5 h to complete the ultraviolet light to irreversible bonding after surface modification, completed PDMS micro circulation way of production and the bonding mechanism is discussed.