Research On Logic Guidance And Restriction Of IC Manufacturing Equipment Behavior

The IC industry is China’s emerging strategic industry, it have important strategic significance in national economy and national defense. IC manufacturing equipment is the core carrier in IC manufacturing process, it is the foundation and support of IC industry. Because the change of IC manufacturing process and high requirement manufacturing efficiency and manufacturing environment, IC manufacturing equipment is organized as cluster structure commonly, this structure lead complicated manufacturing process and complex constraint of behavior, an efficient and robust logic guidance and restriction of behavior is crucial to ensure the high reliability and high capacity.Firstly, through analysis the execution process of behavior in IC manufacturing equipment, system prototype of behavior logic control is built. The system prototype includes four kinds of element and two kinds of logic control model. Elements in system prototype includes triggers, states, activities and events. Logic control models in system prototype includes logic controller of behavior and state controller.Secondly, mathematic models of four kinds of element are established in the form of collective. Based on the mathematical model of elements, rules to realize logic control are established. Then the behavioral logic control system is established based on the above elements and rules. The behavioral logic control system is a discrete dynamic system(DDS), it can realize logic control of triggers and events.In order to ensure the correctness of the logic control system, tow kinds property of system are defined. The properties of system include rules completeness and system activity. Then proposed the method of proof rules completeness and system activity by the matrix moding of logic control system.In the end, based on the mathematical model of behavior logic control system, a equipment behavior logic control software prototype is developed. This control software realizes modeling system, verification of system properties and testing in simulation mode. Logic control system model of wafer transport behavior in epitaxy equipment is built by the equipment behavior logic control software prototype, and the effectiveness of behavior logic control system model proposed is verified through simulation test.