An Investigation Of Stability And Consistency Of MOS Gas Sensors

Gas sensors as the signal conversion equipment from the physical and chemicalparameters of gas to electronic, play an important role in the moment. However, stabilityand consistency as thet wo most important properties of gas sensors, in the current study,were relatively lack of data, and consistency was even almost no available literature forreference. Stability and consistency are important indicators which relate to the prospectof the gas sensors. The purpose of this paper is to explore the effect of nano SiO2whichdoped to metal oxide semiconductor gas sensors for stability, and the impact of improvedscreen printing technology on the device consistency.In this article,we prepared amorphous nano-SiO2sol by sol-gel method,and doped theSiO2sol into nano-ZnO, In2O3, WO3powders. Then sintered the doped ZnO, and madeeight different gas sensors which based on the doped In2O3and WO3materials. We usestability&conformance test platform which made by ourselves for accelerating aging testsunder air and ethanol atmosphere. It was found that SiO2could effectively improve thestability of the sensor, and can also improve the sensitivity of the sensors in a certainextent.Additionally, it can achieve automatic alignment and overprinting of the sensing filmthrough the improvement of the traditional screen printing technology. The device whichwere made by manual and automatic techologies were investigated their consistency in thestability&conformance test platform. It was found that compared with traditional manualalignment techology, using automatic alignment techology can significantly improve theprinting precision of the sensing film while the consistency of the device has also beengreatly improved.