Dimensional Feature Information Extraction And Trajectory Tracking Control Study In SEM Nano-operation

Automated micro-nano operation can remove the disturbance ofhuman factors. To the repeating operation, automatic operations canimprove the accuracy of the task compared with manual operation. soautomatic nano-operation technology become more and more attentionand research, but the accuracy increase of automatic operationrequirements led to put forward higher requirements of a system ofoperation for each step of the process. Analysis of the whole operation,premise of automatic micro-nano operation is determined by thefollowing key factors, the accuracy of the probe to obtainthree-dimensional coordinates, route planning campaign probe, probetrajectory planning and control of the probe according to the planningtrajectory accuracy.In this paper, based on the analysis of the existing planecoordinate extraction method of SEM probe micro-nano operatingsystem, I propose a new method based on the coordinate search probetip edge plane coordinates to increase positioning accuracy and analyzethe relationship between extraction and gives solutions to probes andnano-line plane coordinates in different locations. Experimental resultsshow that this method allows the positioning accuracy of the probeplane coordinates to reach pixel level. In order to obtain the heightcoordinate of the probe, firstly, based on two-dimensional imageprocessing on the SEM and SEM values of different heights, I give atwo-dimensional gray variance relationship between both probes andanalysis the relationship between the statistics. The probe different height values and images are discrete point data variance and finallythe discrete points in Matlab to calculate the error rate to be merged,the experimental results show that the accuracy of the probe heightpositioning methods to meet the requirements of nano-operation.Nano-probe task requires automatic operation when planning apath through different locations in different parameters such as velocityand attitude probe. We use three-dimensional data to calculate thethree-dimensional coordinates of the tip relative Attocube offset angleand rotation angle and different methods were applied to establish aAttocube various translational offset angle and the rotation anglevelocity, a function of the relationship between acceleration and timeso as to realize the probe trajectory planning. Due to the uncertainty ofmicro and nano operating system parameters, in order to ensure theprobe tip can be moved and to ensure minimum deviation, the proposedmethod feed-forward controller and a feedback controller in accordancewith the joint control of trajectory planning. A feedback controllerdesigned to track the performance evaluation of the introduction, andthe signal amplitude robustness evaluation function, the evaluationfunction will be added to the transfer function of the control system.Finally, under the planned trajectory using Matlab and triangular wavecurves at different frequencies for tracking control method simulationresults demonstrate the effectiveness of the control method.