Research Of SAW Device Based On ZnO/Glass Structure

Surface acoustic wave(SAW)devices are characterized by small size,high frequency and high reliability.Saw devices can be applied to sensors and microfluidic devices. SAW sensors can be wireless and passive,they have good sensitivity and strong resistance to interference.There are many kinds of SAW sensors.SAW sensor is one important aspect of modern sensors.SAW devices can also be used in microfluidic devices,they can used for pumping, hybrid, particle agglomeration, heating and atomization.SAW device is one promising aspect of microfluidic devices.The study of SAW devices have significant values.Glass is transparent, cheap and easy for fabrication.ZnO film is transparent,non-toxic and has good piezoelectric properties. SAW device based on ZnO/Glass structure was investigated,especially focusing on the applications of UV detection,TCF and microfluidics. A simulation using COMSOL software was also made.According to the experiment results.SAW UV detector has a fast reponsing time of1.6seconds and its sensitivity is36.4ppm/(mW/cm2), its TCF is only-9.8ppm/K.The microfluidic SAW device also shows good performance.