Trajectory Planning And Virtual Simulation Of Nano Components Based On SEM Images

The characteristics of the objects change a lot extending from the macro-scale to the micro/nano-scale, so micro/nano-operation methods and macro-operation method are different. In this paper, the operation method and theoperation trajectory of nano-components are researched based on SEM images.Nano-component position information are achieved by using digital imageprocessing technology. Virtual environment establishment and simulation areachieved by using Attocube positioning device, CHAI3D virtual haptictechnology and virtual reality (VR) technology.Nano-component pose information is extracted through analyze the SEMimages. Area mark method and OpenCV recognition method are usedrespectively to identify and extract different object pose information in2D SEMimage. The efficiency is compared in the two different experiments. Freemanchain code edge repair method is proposed, so that pose information extraction ismore reliable when different objects contact. Experiments are done for the imageblur, so that the SEM image blur and Z-height of the probe model is established.To ensure stably and the success rate of nano-components operation,constraints of the nano-components operation are derived through the existingmechanical model. By image blur, rough operation and fine operation of theAttocube, Z direction control of the probe is realized. By analysis the Nano-component rotation and translation process, the relationship between the numberof Attocube steps and the rotation point is deduced. So the component rotationand translation control strategy is established.Finally, virtual3D environment is rapidly established by OpenGL, andvirtual haptic is realized by using CHAI3D. The original skeleton sphere modelis improved, so the fracture situations of the virtual nano-components can besimulated more realistic. The virtual reality coordinate mapping relation is created. Virtual reality component pose are correspond by extracting3D positioninformation. ZnO nanowire virtual operation and interactive operationexperiment is done on the established experimental platform, and theexperimental results are analyzed.