| In order to meet the high efficiency and the development of the wafer transmissiontechnology, a kind of three degree of freedom parallel robot mechanism with limbs ofembedding structures was studied in this paper, which can improve products quality andspeed up the efficiency of production based on the constraint conditions.Firstly, the development status of silicon transmission robots, parallel robot and themethods of trajectory planning are summarized briefly. And the background andsignificance of the trajectory planning research of the similar-SCARA parallel robots areexplained, too.Secondly, By analyzing several planning curves of speed used in industry commonly,their advantages and disadvantages are compared. Combined with object in this paper, Sshaped curve is selected. Based on the characteristics of the object, the motions of the endof manipulator are planned respectively in the horizontal and vertical direction in theoperating space. Then the optimal solution is solved using MATLAB, and the shortest andsmoothest motion trajectory can be got.Finally, It analyzes position, velocity and acceleration of the similar-SCARA parallelmechanism in the cylindrical coordinates, and gets their mathematical models. Based on themodels, the parameters of each control motor can be gained by space transformation. Thenthe curves of the displacement, velocity and acceleration of each motor are simulated withthe help of MATLAB. Examples verify the feasibility of this plan. |
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