The Research And Development Of Fabrication Method Of Reflecting Replica Grating

The fabrication method of reflecting replica grating is research and developmentin this paper by1200lines/mm reflecting replica grating. The replica grating has thesame performance with master, but it has low cost. The main contents are shown asfollow:First, we introduce the classification and application of grating, the now statusand development in future. And the meaning of research and development thefabrication method of reflecting replica gratingSecond, we present the theory of diffraction grating and the manufacture methodof master. We take holographic interferometer and ion etching method to make masterfor duplicate process.Finally, we take the combination of theory and practical to research and developthe duplicate fabrication process. Base on the structure affect on the performance ofgrating, refer to the research of domestic and overseas, analyze the merit and demeritof different duplicate method, use software to model analysis the function of microchange of grating grooves structure, then carry out the research and development ofthe fabrication method of reflecting replica grating.By lots of experiment and improvements, we get final replica grating. Comparethe replica grating with master, they have the same structure by SEM test result, andFlatness and wavefront distortion are similar by ZYGO interferometer test result, andthe diffraction efficiency is similar too.So, the reach and development of fabrication method of reflecting replica gratingin this paper is successful. By the fabrication method, the replica grating with sameperformance with master and low lost will achieve.