Verification System For Static And Dynamic Characteristics Of Stylus Profilometer Sensor

Stylus profilometer is considered to be a golden method for2-D profile and3-Dsurface topography measurement due to its reliability in test. The development ofadvanced manufacturing technology requires faster and more accurate measurement ofsurface profile and morphology. Stylus profilometer sensor static and dynamicperformance is very important in surface morphology for rapid and accurate measurement.Therefore, this paper designs and constructs a verification system for static and dynamiccharacteristics of stylus profilometer sensor.The designed verification system consists of the displacement generation unit, thedisplacement measurement system and analysis and evaluation software. Displacementgeneration unit is driven by motor coordinated with piezoelectric ceramic, which enablesthe workbench to reache30nm resolution in10mm large scale precision driving. The widerange and high resolution precision driving is suitable for sensor static characteristicverification. Used for dynamic characteristic verificaiton, the piezoelectric ceramic drivestranslational flexible hinge to produce200Hz and more than5μm range and nanometerresolution dynamic displacement. Simple and accurate, the structure designed can ensurethe running smooth during the dynamic drive. Displacement measurement unit aims at theaccurate measurement of displacement. Following the grating diffraction interferenceprinciple, the mathematical equation of interference light signal is derived. Then, selectthe optical device is selected and the support and adjusting sturcture of the light path isdesigned. Besides, based on the VC++and MATLAB platform, the supporting software ofthe verification system is designed, including control and debugging software,measurement software and analysis and evaluation software, to realize the automaticverification process of data collection and evaluation of dynamic and static characteristics.Based on ANSYS software sturcture optimization, force simulation anslysis as wellas dynamic response simulation analysis, the paper systematically constructs the static anddynamic properties of stylus profilometer sensor verification system, and uses the MCV-500laser Doppler interferometer to verify the system. Results show that the deviceresolution is1nm, measurement error in9.8mm range is less than0.1%, dynamicverification can check200Hz maximum frequency, and the corresponding dynamicverification of peak-to-peak value is5.8μm, which complies with the design requirements.