Design And Implementation Of Lithography Machine Software Test Automation Tool

Lithography is the production of LSI core equipment, the need to build and maintain ahigh degree of optical lithography and electron industry base. As integrated circuitmanufacturing process is the most important part of lithography, lithography equipment, itssoul, a combination of many of today’s modern technology in one. If compared to a personlithography, lithography machine software is the human brain, the practical application oflithography machines, determines the degree of complexity and precision of the lithographymachine software to be much more than an ordinary application software, to ensure thereliability of the brain, to ensure the normal operation of lithography software developmenteffort requires more than officers, a large number of software testing is essential.The goal of this thesis is to design and implement an automated testing tool for advancedpackaging lithography stage domestic software development process, which implements thegeneral operating environment on a test run on SUN platforms and vxWorks platformlithography machine software, and help automate the testing process, improve work efficiency.After this set of automated testing tools to achieve, in the actual work has also been relativelygood.First, the paper introduces the basic principles of lithography, and then describes theadvantages of automated software testing, automated testing software after the papers in thecurrent situation at home and abroad are analyzed and briefly describes the process ofsoftware automation testing, after the existing Some commercially available automated testingtools on the market research conducted, on this basis, developed a set can be consideredsuitable for automated testing tools existing lithography software systems developmentprocess, is the most appropriate for the current situation. Before tool development, the paper describes the structure of the whole stage, the latestsoftware packages domestically advanced lithography machine, displaying the systemarchitecture and system-wide lithography machine software, based on this, describing thelithography machine software the main business and functional requirements, and analyzesthe actual production process, the main operating parameters of the lithography machinesoftware.After the above analysis, this paper will enter the test phase of the tool designrequirements, describes the software design background, and automated testing tools softwareneeds to achieve an overview of the overall design objectives and proposed the idea ofautomated testing tools, in based on this, the decomposition of automated testing tools to testdrive module testing common library module, the code generation module, a data servicemodule several parts, respectively, to achieve universal test drive, the bottom of the testinterface public libraries, code generation, data services, function.In the implementation phase of the tool, the thesis describes the selection of the overallautomated testing framework, describes the design and development requirements mentionedin each module focuses on describing the technical characteristics of the test the publicinterface library modules are used, communication mechanisms, and error handling way.Public interface library to the underlying test is based on co-ordination between the variousmodules can achieve the ultimate goal of automated testing. The thesis also agrees on the testfiles, test data file formats, and related configuration information.After the completion of the development of automated testing tools in the actual testingprocess lithography software systems for automated testing tools for the experimentalverification of the test results do statistics and analysis.Finally, the thesis gives a summary of the work, points out the lack of the design andimplementation of automated testing tools, and discusses the future direction of development.