Key Technology Research Of Epoxy Probe Card Manufacture And High Temperature Test

The probe card is precision interface card that used to testing the functionparameters of integrated circuit product before packaging, which between theautomatic test system and integrated circuit chips. It is closely connected with theintegrated circuit design and testing. Epoxy probe card is currently the mostcommon use of probe card. But because of the restriction of domestic probe cardtechnology level, manufacturing of epoxy probe card is not mature enough. Since theprovisions company confidential, we cannot use some technology for reference andlearning when we made probe card. At the same time, the probe card in hightemperature test, also often encountered in abnormal probe mark and abnormal testresults.This paper introduces the composition, types, the development process of theprobe card, and its application in different fields. This paper taking the epoxy probecard’s manufacturing and using which made by the author for an example, describedprobe card’s production process in detail. At the same time, the author researched thepractical problems that encountered in epoxy resin probe card’s making and using,especially for probe mark problem and probe card when using test temperatureinfluence test result’s problem has carried on the detailed analysis, and puts forwardthe solution to these problems.