Study On SiC Surface Roughness Control Model Of Femtosecond Laser Machining

Femtosecond laser processing is a kind of important micro-nano processing field processing method, its processing and application scope is widespread, from the soft metal, such as the hardened steel, stainless steel, high speed steel, cemented carbide and other hard processing material, to the semiconductor, glass, ceramics and other hard brittle non-metallic materials. Femtosecond processing important features is the small scale by machining, machining accuracy high, almost no heat affected zone, etc.Represented by silicon carbide (SiC) of wide band gap, semiconductor has low thermal expansion coefficient, high temperature resistance, excellent chemical stability, good electrical insulation, low and stable ultrasonic delay performance, best ultraviolet spectrum performance as well as visible light and near infrared spectrum properties and mechanical properties which is higher than common glass.(1) Built the control model of the femtosecond laser processing the wide band gap materials surface roughness. Bring to dual temperature equation. The model of the femtosecond laser material is established, and the model is calculated, and the variation of temperature is analyzed.(2) Numerical simulation of the surface roughness of the wide band gap materials by femtosecond laser processing. According to the physical parameters of SiC, using the MATLAB software to analyze the surface morphology, lattice temperature, reflectivity, absorption rate and so on.(3) We prove the rationality of the model and the simulation by doing experiments. According to the results of MATLAB simulation, the factors that influence the roughness of the femtosecond laser processing SiC are discussed, and the overlap rate is calculated.