| With the rapid development of integrated circuit technology, Micro-Electro-Mechanical Systems (MEMS) appeared. MEMS is the micro devices or systems included micro actuators, micro sensors, signal processing, control circuit and so on, and it can be obtained in mass production. It is an intelligent system and range in size from a micrometer to a nanometer. As an important component in the MEMS devices, Micro-mechanical resonators are always operate in the natural frequency. The quality factor can be expressed as the ratio of total energy and energy dissipation each vibration period in the systems. And it is a common parameter and a key indicator of micromechanical resonators. Thermoelastic damping (TED) is an important energy loss mechanism and has an effect upon the quality factor of the micromechanical resonators. In order to design a high quality resonators, we need to predict TED. Thus, the purpose of my paper is to derive the model which can accurately calculate TED.The rectangular microplates are often used in MEMS devices. As for the axial symmetric rectangular microplates resonators, although there are some analytical models based on one-dimensional heat conduction theory (1-D theory) developed in the out-of-plane vibration of rectangular microplates, they only consider thermal conduction along the plate thickness direction. In order to improve the precision of the TED model, this paper presents a set of analytical approximate models to estimate the TED in the rectangular microplates vibrating in the fundamental model. The model will consider thermal conduction along the plate length, width and thickness direction(3-D theory). At last, the Finite Element Method(FEM) is used to calculate the TED by ANSYS. By comparing and analyzing the 1-D,3-D and FEM theory’s numerical models built by MATLAB, the 3-D theory is more precise than the 1-D theory. In other word, the 3-D theory’s reliability and applicability are verified. |
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