Research And Design For A Precise PZT Power Supply With High Power

With the constantly improvement of science and technology as well as development of industrial engineering, micro-positioning technology has become a key technology for researchers extend their research from macroscopic to microscopic field. The piezoelectric ceramic (PZT) materials have advantages of high resolution of displacement; do not produce heat and not susceptible to electromagnetic interference which makes them become an ideal drive element in micro-positioning system. The most important thing driving PZT is its power supply which is designed and researched in this paper.This paper main contains following three aspects.(1) This paper study on modeling of driving characteristics (voltage-displacement curve) of PZT, and raised a method to forecast it meanwhile designed an algorithm to compensate hysteresis based on the method. Experimental results show that the forecast method and compensation algorithm are with high feasibility and practicality.(2) A PZT driving power supply which outputted precise DC voltage with low ripple, high linearity, high stability and high repeatability was researched and designed. In order to improve the response speed and frequency in driving PZT loads, the power supply designed also had one function to amplify output power. In this research, hardware circuit was designed and produced; components were selected; software of the power supply was written. The power supply designed can communicate with PC via communication interface and receive control instructions from PC. Software includes microprocessor initialization, interrupt program, communication response program, D/A converter control program, voltage signal acquisition program and the PZT hysteresis compensation program.(3) Performances and parameters of the PZT power supply including voltage ripple, linearity, stability, repeatability and actual output power were tested through corresponding experiments. PZT was drove with hysteresis compensation function opened to verify its effect. Laser speckle interferometry measurement was down using this power supply to verify its practical effects. Experimental results show that all design parameters of the power supply were met.