| Cu(In,Ga)Se (CIGS) and CdTe are the dominating absorber materials of thin film solar cell However, due to the scarcity of In and Te, and the toxicity of Cd, the development of new absorber materials is urgently needed. Because of the merits of low-cost, proper band gap, eco-friendly and many other advantages, alternative ternary copper antimony chalcogenide (CAS(Se)) materials are expected to become one of the promising absorber materials. In addition, the melting point of CAS(Se) is much lower than that of CIGS and CdTe, therefore, the substrate temperature (Tsub) during the preparation of the film can be reduced, which is beneficial to reduce the manufacturing cost and help to develop the flexible battery of the polymer substrate. We successfully fabricated the solar cell with the structure of SLG/Mo/CuSbS2/CdS/i-ZnO/AZO/Ag.High pure CuSbS2 thin film was synthesized by the method of multiple-source co-evaporation.The first step is co-evaporating Cu, Sb, S materials with a tow Tsub, for getting a Sb rich precursor film layer, and the second step is co-evaporating Sb, S at higher Tsub, to improve the crystallinity of the thin film. The characterization of the morphology, structure, optical and electrical properties will be introduced in details in this paper. Besides, we also successfully made high pure CuSbS2 thin film by spray-pyrolysis process and Cu3SbSe3 thin film with a method of multiple-source co-evaporation.In this paper, we achieved the ideal back electrode layer using the double layer magnetron sputtering method, a thin high resistive i-ZnO layer by RF magnetron sputtering method, a thick low resistivity of AZO layer by DC magnetron sputtering and a CdS buffer layer by chemical bath deposition. In addition, we characterized the morphology and structure of these layers.In order to improve the thermal stability and chemical stability of the window layer, SnO2:Sb films have been prepared by DC magnetron sputtering at room temperature. The effect of different deposition parameters on the structural, electrical and optical properties of SnO2:Sb films was investigated. The O2 flow rate and DC power were found to have an effect on the properties of the SnO2:Sb films. |
