Development Of A 2D Laser Measurement System With Multiple Degrees Of Freedom

In this paper, a method and a device were studied and designed for the measurement of 2D multiple-degree of freedom, which can be used to position the large stroke of worktable in high precision. The measurement system of angle and displacement was designed by using the same laser optical path measurement system is developed, which can solve the limitation of single parameter measurement at present. The main job was done as follows:(1) The laser measurement method of two dimensional multiple-degrees of freedom was studied, and the measurement principle, which can measure angle and displacement simultaneously, was introduced.(2) The design of 2D laser measurement system with multiple degrees of freedom.(3) Laser light source for optical fiber coupling to achieve 1*2 fiber optical splitter.(4) The design and analysis of the optical path of the measurement system of the angle and displacement.(5) The mechanical design and debugging of the measuring system.(6) The design of signal processing circuit of measurement system.(7) The compilation of data acquisition program of the measurement system.(8) The experimental study and error analysis of the measurement system.Experimental results show that the developed laser measurement system has advantages, such as large stroke, high precision, low cost, etc. The length measurement range of system with the resolution of nanometer, and the stability is better than 50 nm. The angle measurement range of system with the resolution of sub second, and the stability is better than 2".