Research Of Micro Gas Chromatographv Based On Silicon Wafer

Gas chromatography as a method of analysis and separation is widely applied in the area of analytical chemistry, organic chemistry, biochemistry and so on. However, because traditional gas chromatography is large and not portable, it can’t satisfy the demands for timeliness and portability. With the continuous development of MEMS technology and semiconductor device manufacturing process, all sorts of micro gas chromatography have become the focus of chromatography research. Because micro gas chromatography has superior advantages such as small in size, low energy expending, it is widely promising in medical supervision, environmental protection, aerospace industry and so on.The purpose of the research is to develop a new micro gas chromatography chip which has high performance. Meanwhile, good results are received via practical applications. Some applications based on the new gas chromatography chip are demonstrated in this research. The research details and results obtained can be summarized as follows:1. By many experiments, we have developed a process to fabricate a new micro gas chromatography chip. The length of the chip is 3m, width is 150μm, depth is 300μm, and many 30μm-cylinders are fabricated in the channel. The chip can successfully separate 13 kinds of n-alkanes.2. We have detected the influence of nano materials such as carbon nanotubes and graphene to stationary phase.3. We also utilize the chip to test the content of n-alkanes in real soils near the highway. The results show that the method is suitable for n-alkanes testing.