Key Technologies Of Micro Hybrid Vibration Energy Harvester Based On Piezoelectric And Electromagnetic

Recently, micro vibration energy harvester based on environmental kinetic energy has become an enabling technology which can solve the power supply problem of various ultra low powered microelectronic devices and systems. However, how to further improve the output power of the micro energy harvester is one of the key problems since the micro vibration energy harvester has got widely application. This article will focused on the key technique research in how to improve the output power of the micro vibration energy harvester, which owns important academic value and broad application prospects.At present, the output power and output voltage of the micro vibration energy harvester can hardly meet the requirements of practical application. To solve the problems, we propose a new vibration energy harvester structure, which is a piezoelectric and electromagnetic hybrid vibration energy harvester that combine MEMS piezoelectric cantilever arrays with permanent magnet mass. In this paper, we have analyzed both the structure and working principle of this hybrid vibration energy harvester, also investigated and optimized the key structural parameters that affect the output performance, then established the main technical indicators for MEMS piezoelectric cantilever array and the induction coil. At the same time, the preparation as well as the patterning of PZT thin film were studied. After exploring the micro fabrication flow and preparation program, samples of MEMS piezoelectric cantilever array and induction coil are successfully manufactured. Finally, the prototype of micro hybrid vibration energy harvester based on piezoelectric and electromagnetic is obtained. To complete the performance test under various conditions, we develop test programs and build a test platform for the prototype. Experimental results show that the maximum total output power this fabricated micro hybrid vibration energy harvester can generate is up to 55.57μW, under 0.3g acceleration and 56.4Hz frequency vibration excitation source.The main contributions of this paper are listed as follows:① The state of the art about the micro vibration energy harvesting was analyzed. Both the science and technology problems of micro vibration energy harvester were studied. Moreover, the research objectives and contents of this paper were determined② At present, the power output and voltage output of micro vibration energy harvester are difficult to meet the requirements of practical applications, So, a cantilever arrays that are fixed with one proof mass with a permanent magnet, The permanent magnet is placed in the induction coil of micro hybrid vibration energy harvester based on piezoelectric and electromagnetic was proposed. This paper has analysis the structure and working principle The analysis and optimization of the influence of the main structural parameters of the micro vibration energy harvester.③ The optimization of micro structure parameters of the compound vibration energy harvester based on ANSYS and Maxwell 3D. Focused on length and thickness of cantilever, thickness of permanent magnet, width and thickness of coil, The analysis and optimization of the influence of the main structural parameters of the micro vibration energy harvester. the technical indicators for the proposed cantilever arrays that are fixed with one proof mass were established.④ The preparation method of the PZT thin film was studied. The micro fabrication flow of the proposed vibration energy harvester was designed and the prototype of the proposed vibration energy harvester was developed. The polarization method was studied and the platform of the polarization process has been setup. Researched method of induction coil and getting the induction coil.⑤ The performance test and analysis platform of the fabricated prototype has been setup, and the performance test and analysis of the fabricated prototype was achieved. Experimental results show that this micro hybrid vibration energy harvester can generate 55.57 μW at 0.3 g acceleration and 56.4Hz frequency. The load voltage of MEMS piezoelectric cantilever beam array is 3245 m V, the output power is 33.97μW; the up coil voltage is 46.7m V, output power of 7.52μW coils; the down voltage is 65 m V, output power of 14.08μW. The voltage output and output power of the micro hybrid vibration energy harvester based on piezoelectric and electromagnetic has been significantly improved, so it can generate high power and high voltage, which can meet the application requirements to some extent.