Fabrication Of PZT-based Multilayer Piezoelectric Ceramic And Actuators

Piezoelectric actuators have been largely applied in lots of areas, which include communication, electronic industry, and medical science et al, because of their several of excellent performances, such as high control precision, fast response, good linearity and low power consumption. Meanwhile, with the development of science, monolayer piezoelectric actuators cannot meet the current requirements of large displacement and generating force in the low applied voltage, because of their disadvantages of high applied voltage and small displacement. In order to conquer these drawbacks, multilayer ceramic actuators have received great attention. The multilayer piezoelectric ceramic actuators were fabricated with two different methods, their properties were studied, and the application in the novel device was explored in this paper.A multilayer ceramic actuator composed of piezoelectrically active 0.90Pb(Zr0.48Ti0.52)O3-0.05Pb(Mn1/3Sb2/3)O3-0.05Pb(Zn1/3Nb2/3)O3(0.90PZT-0.05PMS-0.05PZN) layers and electrically conducting silver metal layers was fabricated by advanced low temperature co-fired ceramic(LTCC) method, and the property of large displacement in the low applied voltage were focused. The results indicate that the sintered multilayer ceramics actuator shows distinct layers with few defects at the interface. The thicknesses of the piezoelectric and conducting layers are about 40 μm and 6 μm, respectively. The multilayer PZT-PMS-PZN actuator, composed of 60 active piezoelectric layers, presents a longitudinal displacement of about 2.7μm at an applied direct voltage of 80 V, approximately 0.1% of the total thickness of itself.At the same time, the piezoelectric stack actuator composed of 100 piezoelectrically active PZT-5 layers that each layer was 0.2mm thickness, was fabricated by the improved cut-and-bond method, and the large displacement and generating force were concerned. The results indicate that the longitudinal displacement of piezoelectric stack actuator is about 19.4μm in free condition, whose stain reaches 0.1%. When added load, the piezoelectric actuator can present a longitudinal displacement of about 20.2μm under maximum 1.5k N loads, and the force is about 3k N/cm2.A multilayer piezoelectric vibrator applied in haptic feedback was developed based on 0.90PZT-0.05PMS-0.05 PZN multilayer piezoelectric ceramic. In this process, the three-dimensional finite element model was constructed by ANSYS software, and the structure was designed by CAD software. The results indicate that multilayer piezoelectric vibrator can generate force of 1N and 0.8N at the stead-state voltage and impulse voltage, respectively, and its best working frequency is in the range of 185~195Hz. Compared with the monolayer piezoelectric vibrator, the multilayer piezoelectric vibrator has a lower applied voltage and more stable working frequency.