| As the requirements of the imaging quality is gradually improved, the new field application demand, for example, the human eye imaging and astronomical observation, the common piezoelectric deformable mirror sometimes it’s hard to meet the demand of the experiment. At the same time, the hysteresis characteristics of the piezoelectric affect the system’s high quality imaging, the cost problem also limits its development in civilian. Therefore, it is necessary to do some exploring research for the low cost, large stroke deformable mirror. Though reading a lot of articles which are about deformable mirror, found that the voice coil actuator deformable mirror has the advantages of large stroke and fast positioning. In foreign, the technology of adaptive secondary mirror and membrane deformable mirror has been mature, which are driven by voice coil actuator. There are many successful cases which are applied in astronomical observation and the human eye imaging field. So, we can explore the big stroke technology of deformable mirror, which is driven by voice coil actuator. Based on lab’s mature piezoelectric deformable mirror technology, we decided to make the piezoelectric ceramic actuator is replaced by voice coil actuator, to carry out the new technology exploration. The aim of all the work in this paper, is to explore specific process and methods which is on researching and manufacturing the voice coil motor deformable mirrors, is to master the basic characteristic of the voice coil actuator, from the physical level to verify the feasibility and application of voice coil actuator deformable mirror technology. The main research content of this paper include:(1) Using the finite element analysis software to establish triangle, square, circular three arrangement schemes three dimensional model of 61- elements of voice coil actuator deformable mirror. Analysis of three arrangement schemes wave-front fitting ability for low-order aberration. From the perspective of simulation experiment, confirms that the scheme is feasibility of and application scope;(2) According to the characteristics of the contactless force actuator, optimizing the force calculation method of force actuator deformable mirror, which is based on the voltage calculation method of piezoelectric deformable mirror. In order to reduce the power consumption of the system, and improve the fitting precision.(3) Design, manufacturing the sample mirror of voice coil actuator deformable mirror, test and analysis the actuator’s basic performance. From numerical simulation and experimental aspects, analysis the sample mirror fitting ability for defocus and astigmatism. Modeling and simulation, design and manufacturing several elements voice coil actuator deformable mirror’s, and testing its’ performance, which making us to know the basic features of the new device and verifying the feasibility of the plan. Its’ basis theoretical and manufacturing experience are good for the future. |
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