| Precision positioning technology is one of the key technologies of nano operation, nano measurement and nano manufacture. Therefore it has a profound significance for promoting the development of aerospace engineering and advanced science and technology to carry out the key technology research of positioning system with multi degrees of freedom, large travel and high precision positioning based on the new mechanism form, drive mode, testing technology and control method.This dissertation depends on the Independent Research Found of Chongqing University State Key Laboratory of Mechanica Transmission and the Open Foundtain of Shang Hai Key Laboratory of Spacecraft Mechanism. In this dissertation a one-piece 6-DOF precision positioning platform(ZL201310029779.5) is designed aiming at multi-degrees of freedom, large travel and high positioning accuracy. Based on the positioning platform, some researches were carried out, such as the structural design, static analysis, positioning accuracy analysis, error compensation, accuracy synthesis, simulation and experiment research and so on, and the main research content is as follows:A 6-DOF precision positioning platform was designed and developed through compliant mechanism theory and spatial mechanism theory, and based on the platform a kinematical analysis was carried out in use of the virtual work principle and pseudo-rigid-body method and the overall stiffness matrix and the kinematics equation of the positioning platform were got. Besides a position and pose describing equation of the positioning platform was obtained through the RPY method.The posture error mathematics model and the error compensation model of the positioning platform were established through error-differential relationship theory, and the concept of error weight coefficient was puts forward. A theory of using error weight coefficient method to analysis effect of the original errors on the positioning platform’s overall posture error and an accuracy integrated approach based on the error weight coefficient were proposed, which revealed the rules of the positioning platform’s posture error changing with geometric parameters.The wire-cutting processing method on the positioning platform was proposed through studying the processing technic. An experimental platform used on the precise positioning system was set up for testing its output characteristic, repetitive positioning accuracy, linearity, precision compensation and so on, and it realized a nano-scale localization with high precision, multi degree of freedom, and achieved the expected design goal. Besides, the comprehensive evaluation of performance was carried out and finally the performance indicators of the positioning platform were obtained.The research of the 6-DOF precision positioning platform applicating in nano-imprinting lithography machine was carried out, and the working principle of nano-imprinting lithography machine was introduced. A 3D modeling of nano-imprinting lithography machine which used the precision positioning platform as a bearing platform was carried out, and a principle analysis and finite element movement simulation work about the bearing platform system was finished. |
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