Design And Research On A Novel Piezoelectric Driven Microgripper With Double-rocker Mechanisms

It requires higher performance for microgripper since the development of micromechanical or microelectronical systems. Microgripper is an endeffector used in micromechanical or microelectronical systems.High precision microgripper is a key technique for micro/nano technology applications.The current conventional microgripper has a large size and a small amplification ratio and low accuracy, and also it’s difficult to monitor the clamping force and displacement,here in this paper, I focuss on designing a novel piezoelectric-driven microgripper with double-rocker mechanisms for micro/nano manipulation.This paper can be divided into the following chapters.In chapter 1, the background and the significance of the research are given. And also the compliant mechanisms for microgripper, the actuation styles and the sensor configuration are summarized.In chapter 2, the structure of microgripper with double-rocker mechanisms is given. Afterwards, the mathematical models including input to output displacement amplification ratio, static equations and dynamic equations based on Lagrange equation are derivated. And at the end, the clamping force and displacement sensor configurations are given.In chapter 3, the finite element method is used to analyze the static status of the microgripper and to verify the parallel clamping characteristic. And later modal test is implemented and natural frequencies and mode shapes are given. Also the step response and frequency response analysises are made to get the dynamic characteristics. The simulation of the sensor configurations shows that the theoretical derivation is right.In chapter 4, the experiment setup based on virtual instrument is given. The experiental platform includes multi-channel and multi-data cards, IPC, CCD camera, pezoeramic actuator, strain gauges and so on.In chapter 5, the performance of microgripper is tested, including clamping force and displacement sensor calibration, input to output displacement curve measurement, sweep signal excitation characteristic, and clamping characteristic.In chapter 6, a conclusion of this paper is made and the prospects and limitations of this microgripper are also indicated.