Design And Simulation Of Monolithic Integrated Triaxial Capacitive Acclerometer

This paper presents a framework for the design of new three capacitive triaxialaccelerometer based SOI process, in which the detection unit horizontal (X, Y axis)using symmetric high-style comb design, vertical plane (Z axis) using asymmetriccomb design, can achieve a single integrated design requirements. And this designwork carried out micro-structure design, simulation, analysis and other aspects.ANSYS finite element analysis software for the design of the structure of thestatic force analysis, modal analysis and harmonic response analysis. This article isdesigned to get through the static analysis of the overall size of the triaxialaccelerometer micro-micro-structure of a few cubic millimeters, far less thantraditional mechanical inertial devices for the consumer electronics field. Three-axisdetection sensitivity of uniaxial mechanical level. Anti-overload analysis, thestructure of acceleration in the anti-overload conditions, the maximum stress occursin the vertical axis of the elastic beam, less breakage limit, to meet the requirementsof anti overload. Also added to the structural design limit stop structure caneffectively avoid collisions comb phenomenon. Accelerometer Under normaloperating bandwidth, detect the axial structure introduced three mechanical thermalnoise, meet the design criteria.Since the basic structural design symmetrical form, so the use of finite elementanalysis software ANSYS structural design modal analysis, found that the first threemodal deflection did not occur, sensitive accelerometers measuring direction. Thefirst three and higher order mode resonant frequency varied widely, can effectivelyavoid interference in other directions. Harmonic response analysis, the maximumvalue of the structure of cross-sensitivity was0.4%, well lateral interferencesuppression, meet the design requirements.