Study Of Duv Imaging Spectroscopic Ellipsometer Of System Calibration

Imaging spectroscopic ellipsometer (ISE) is an instrument that can display andmeasured the region of interest in real time. It have been widely applied in grapheme,solar cells, self-assembled monolayer, protein-protein interaction and so on, due to theadvantages of non-destructive, non-regorous, high precise and image to the region ofinterest.Because the parameters of ISE system must be calibrated which will affect theaccuracy of the measurement greatly before the sample to be tested by ISE. Thisthesis organized around the calibration of ISE system. In order to calibrate theimaging ellipsometer system accurately, we studied the relationship of the ISE to thesystem parameters in deeply and optimize the relevant parameters of the zero-orderwave plate, and then a method of calibrating imaging ellipsometer system parametersis proposed. We set up an experiment system and the experimental results agree wellwith the theoretical forecast. The main research contents of this dissertation as follows:1. A method for measuring the misalignment angle of the optical axes and phasedelay is reported. By analyzing the optical theories, we select the appropriatephysical model into the complex theoretical derivation and obtain the formula.Then we simulate the formula by software to verify its correctness and confirmmisalignment angle is0.15°and the phase delay in different wavelengths throughexperimental platform.2. The chapter is to design the process of imaging spectroscopic ellipsometer and tostudy method of system calibration. First of all, we can obtain a mean thickness ofthe sample by the light spot after measuring the sample thickness by spectroscopicellipsometer. Next if the sample related information is known (e.g., the refractiveindex n, the absorption coefficient k), we set up the optical experimental platform,then save the pictures (memory intensity information of the sample surface), whenthe compensator is rotated to a designated angle. We can obtain the correspondingFourier coefficients through the different light intensity by rotating compensator.The system parameters of imaging spectroscopic ellipsometer is fitted using theleast squares method, including the system incidence angle, the azimuth angleof polarize Ps, the azimuth angle of start rotating compensation Cs, phase delay ofthe compensation, azimuth angle of analyzer As. Finally, we measure thethickness of the interested sample through the system parameters of imagingspectroscopic ellipsometer which is calibrated. We calibrate the systemparameters on the optical experimental platform including the system incidence angle61.56°, the azimuth angle of polarize61.90°, the azimuth angle of startrotating compensation35.86°, azimuth angle of analyzer10.58°.3. Through the study of the system calibration method and the theoretical analysis inthe experimental laboratory conditions, we propose Mueller imagingspectroscopic ellipsometer system calibration methods. It is useful in researchingMueller imaging spectroscopic ellipsometer and Mueller spectroscopicellpsometer.