Development Of A New Continuous Diffusion Furnace For Solar Cells

As the drying up of traditional energy and its incidental environmental pollution,new energy technologies is developing. The rapid development of solar energytechnology presses for the innovative development of the solar cell productionequipment. The Design of automatic and efficient continuous diffusion furnace hasimportant practical significance to promote our country industry automatic diffusionsilicon solar cells.This article is based on the project of Shanghai Science and TechnologyCommittee about " development and application of energy conservation andemissions reduction technology " and " manufacturing technique of efficient crystalsilicon PN junction and automatic equipment manufacturing, this article analyzes thediffusion process of the solar cells with the development trend of equipment solar cellproliferation and completes the design of a continuous diffusion equipment, thenenhances the overall uniformity of the solar cell to provide technical support byvarious performance experiment validation of equipment.Firstly, making the theory study of the solar cell diffusion, including diffusiontheory，the influencing factors of diffusion, and the continuous diffusion method.Emphatically analyzing the continuous diffusion mechanism, establishing themathematical model and relevant boundary conditions, and numerical simulation,verifies the uniformity of continuous diffusion.Secondly, designing the general structure of the diffusion furnace、boatingsystem、oven door system、 pneumatic system、 temperature control system and PCinterface based on the working principle of continuous diffusion.Finally, the various performance of the continuous diffusion furnace isexperimented, Theses experiments verifies that the various performance diffusionfurnace of can meet the requirements of continuous diffusion and productionrequirements. According to trial production samples of square resistance data, the trialproduction of the sample piece uniformity is improved obviously. The feasibility of continuous through type diffusion method is verified, and it provides support for theoptimization of diffusion process equipment.Continuous diffusion furnace in this paper has completed trial production, andhas been put into the optimization and application stage.