Experimental Studies On Subsurface Damage Of Fused Quartz Optical Components

The fused quartz optical materials is a kind of new and high technology products.Both aerospace and daily life can meet the material application. The manufacturing costand the complexity of manufacturing process is far more than other similar products.Because of its manufacturing products is difficult. So the quality of finished productsbecome the problem that the people most attention. Which is of special importance tothe subsurface damage detection. In this paper, on the surface of the molten quartzoptical element damage as a centre for research and discusses the relevant.Organize several commonly used the surface damage detection method andprinciple. Analyzes the advantages and disadvantages of several methods. And on thisbasis, this paper discusses the use of confocal fluorescence microscopy to detect thefeasibility of the optical element and dart layer damage and accuracy.From the stress analysis, the structure of the formation and damage of the aspectsof the formation mechanism of surface damage are studied and discussed. And throughthe Angle of polishing experiments shows several different microstructure of the surfacedamage. From optical microscope and get the general depth of damage layer. Gives anintuitive concept. Through the nano indentation experiment further demonstrates thespecimen surface crack generation and the phenomenon of diffusion. The fused quartzglass vickers hardness and fracture toughness of concrete numerical value. Verify theaccuracy of surface damage mechanism.Using confocal laser scanning microscopy of fused quartz glass specimen surfacedamage detection experiment was carried out. On the basis of explain in detail thecomposition of the fluorescent quantum dots, properties and methods of use. Using twokinds of confocal microscope respectively obtained the surface damage of thespecimens tomographic images. Through the testing of the specimens obtaineddistribution image of the surface damage. Through professional software Image-ProPlus6.0processing form the scope of distribution density. Make inspection content hadrelatively specific quantitative results.Through a series of polishing experiments. Analysis and research on lapping andfused quartz optical element in the process of machining parameters and the relationshipbetween the surface quality. Established prediction model of surface roughness andsurface damage. After parameter optimization finally got fused quartz optical elementprocessing parameter multi-objective optimization model. And through experimentverification, determine the validity of the model.