Excitation Characteristics Of Gas Sample Of Low Pressure Micro-ICP Excitation Source

Emission spectrometer is one of the important analysis chemical compositioninstruments. Micro inductively coupled plasma (Micro-ICP) excitation source is a newlow-pressure discharge excitation source still being studied. Compared with conventionalinductively coupled plasma (ICP) excitation source, it has the merits of low powerconsumption, low argon consumption, size and weight reducing significantly, low cost andeasy for mass-production. Micro-inductively coupled plasma excitation source is expected tobecome a new spectrometer excitation source. Excitation source performance testing andsimulation theory of micro-ICP study are less reported, so study on excitation characteristicsof gas samples characteristics is meaningful.Present work is to build MICP excitation source test system platform，explode samplegas including Ar, Ar-CH4, C2H2, freon and other samples, analysis excitation results.According to sample test data calculation impedance of plasma parameters, evaluated microexcitation source excitation function and application range. Accordance to the principle ofmicro-ICP excitation source and excitation source discharge structure establishment of atheoretical model, exploring micro-ICP plasma excitation source performance and sampletypes for analysis and do a qualitative analysis and primary quantitative analysis.Ignition power of MICP excitation source can be reduced to3~5W (600~1200Wregular ICP excitation source), and frequency can be reduced from microwave to RF section,volume is to one of hundreds of points. Miniaturization and energy saving have obviousreceded. To be a new excitation source of spectrum and mass spectrometry is expected, usedin the food, environmental protection, metallurgy and other fields of trace element detection.Along with the deepening research on micro-plasma excitation source, it may becomespectrometry and mass spectrometry analysis and testing instruments, such as a new type ofexcitation source and used in micro-analytical and measuring instruments, with broadapplication prospects.