Studies On Microstructure Of Cobalt-base Alloy And Fine-grained Pure Metals Used For Sputtering Target Materials

This paper, by using Optical microscope(OM), X-ray Diffraction(XRD), Scanning Electron Microscopy(SEM) and Transmission Eelectron Microscopy(TEM) and Electron back scattering Diffraction(EBSD) analyzes the composition of amorphous cobalt-base alloy and the microstructure of sputtering target materials, using of Energy Dispersive Spectroscopy(EDS) to determine the composition of each phase, with Differential Scanning Calorimetry(DSC) to measure the formation temperature of organization and alloy melting point. The results of Microstructure analysis show that the amorphous component cobalt-base alloy casting have only very small amounts of residual pore, fine and uniform distribution of each phase size. Based on the microstructure of casting alloy and DSC results, the process of solidification microstructure formation and evolution were analyzed and discussed.At different temperature and different Compression ratio, the pure aluminum and copper were subject to Multi-axial Compression(MAC) deformation, Microstructural evolution during the recrystallization with various deformation tempreture and different Compression ratio was analyzed and discussed in detail based on microstructural studies by Microhardness Tester and Optical Microscopy(OM), Mechnical properties of pure aluminium and copper, such as microhardness, were measured and studied in terms of microstructure.The research results show that hardness with compressed cycles did not change significantly on the process of pure aluminium deformation at the room temperature, because the layer fault of pure aluminum can be high, there is no second phase pinning dislocation, causing dynamic response easily; Then the experiment adopted the method of improving the compression ratio and reducing temperature deformation on the processing, it can make hardness increased obviously with the increasing of compression ratio and temperature decreasing, and grain further refined; Surface hardness of the minimum compression ratio increased by 28.5%, the center hardness of the sample increased by 41.7% after three cycles, the average grain size of central region refined to 19.09 μm. Pure copper due to layer fault lower, effect is not obvious compared with the pure aluminum after taking measures, surface of the specimen hardness increased by 29.91% under liquid nitrogen tempreture, the center hardness increased by 35.61%, grain refined to an average of 3.50 μm after three cycles.