Characteristics Of DyBCO And CeO₂ Thin Films Prepared By Ultrasonic Spray Pyrolysis Method

the term “Functional Materials”appeared very early, they have been widely used in recent years.Most of them can be prepared into thin film materials, which forming performance characteristics of materials. To develop the applications of thin film, it is very necessary to make the thin film into large-scale industrialized production. So it is a challenge for people that how to use cheap and easy to industrial production technology to obtain functional thin film. Considering the ultrasonic spray pyrolysis technology has advantages of cheap, high film-forming rate and easy to industrial production, it has much more potential to promote industrial development of the functional thin film.This paper aimed to study the preparation process and performance of DyBa₂Cu₃O_7-x（DyBCO） and CeO₂ thin film on the basis of self-building temporary ultrasonic spray pyrolysis device.In the study of using the self-building ultrasonic spray pyrolysis device to prepare the DyBCO thin film which contains a small amount of impurity phase, and analyze the effect of deposition temperature, deposition time and the proportion of metal cations on the thin film phase composition and morphology characteristics. It shows that the increasing deposition temperature can improve the crystalline quality of DyBCO thin film, and it is good for the thin film rapid growth. It is also found that reducing the proportion of Cu²⁺ in the precursor solution can decrease the impurity phase material which is produced in the process of preparation. And in this study, it is further found that with the increasing deposition time, the crystalline quality of DyBCO thin film is further improved,and the impurity phase peak decrease significantly, and in the same time, thin film surface graining phenomenon is also weaked greatly. The above research can provide effective suggestions to getting the further growth process of pure DyBCO thin film.Based on a cubic texture of CeO₂ thin film can be used as the epitaxial growth texture substrate of coated conductor superconducting layer, and it also has wide application in the field of optical thin film. This paper use the self-building ultrasonic spray pyrolysis device to study the preparation process and performance study of CeO₂ thin film. The results show that compared with the nitrate cerium, if the experiment choose acetate cerium as precursor solution to prepare CeO₂ thin film on the quartz substrate, its growth orientation is relative single. Especially, in this study we found that when the deposition temperature is 600℃, its growth orientation almost only has（111） orientation,but the thin film surface graining phenomenon become more serious. On the other hand, if the experiment choose nitrate cerium as precursor solution to prepare CeO₂ thin film, the flm has（200）preferential growth orientation with better surface compactness and no graining phenomenon. In addition, the study found that if the experiment choose single crystal Si（100） as the CeO₂ thin film substrate, its growth orientation become more complex, this result show that this substrate Si has no control effect to good lattice match substrate on thin film growth. Finally, Focus on the influence of deposition temperature to the optical properties of CeO₂ thin film, the research shows that with the increase of deposition temperature, the average transmittance of CeO₂ thin flms increases gradually,when the deposition temperature is 650℃, the thin films have the high transmittance of near 85% in the visible region. In the same time, as the deposition temperature increases, the light absorption of thin film changes from defect absorption to intrinsic absorption gradually. These results will provide a effective reference method for the growth regulation of the functional thin film.