| Aerostatic guideways using porous restrictors have become more and more popular in the ultra precision manfacturing fields for its high accuracy and load ability as well as the cleanness without polution. Several key technologies of the porous aerostatic thrust bearings were studied by this paper, the static behavior of the concave porous thrust bearings was anslyzed firstly, and the frequency behavior analysis was carried out for the porous aerostatic guideways thereafter, finally, 2D motion pairs table of high accruacy and stiffness was built and its accuracy was tested.The main contents inclued: according to the key techniques analysis of the porous aerostatic thrust bearings, it suggested that the stability, siffness and relibilty is affected by the static behavior and values, the permeability and dynamic behavior of the porous medium; Fluent software based the finite volume method was used to model and analyze the porous concave aerostatic thrust bearings, and the influence of the air gap,supply air pressure, porous restrictor thickness and concave depth towards bearing characteristics was studied respectively;fluent-solid coupling method was used to analyze the effect of the air gap pressure towards the bearings base finally.; Simulation module of Solidworks software was used to compare and analyze the stiffness influence of the T type aerostatic guideways towards its modal, Data Physics 730 dynamic singal analyzer was used to data acquistion and modal analysis, the comparison was made, it suggested that the support siffness is the critical influence factor of the slide pairs frequency.2D motion table of high accuracy, stiffness and speed was designed and developed, mechanical characteristics of the its main parts were analyzed, and NC system type was choosen based on the calculation. The positional accuracy was tested using dual-frequency laser interferometer thereafter, the influence of the part error towards the position accuracy was analyzed. |
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